Skip to main content
padlock icon - secure page this page is secure

Morphology and Structural Properties of a-Si:H and a-SiC:H Films Controlled in Nanoscale

Buy Article:

$106.34 + tax (Refund Policy)

Morphology and structure of hydrogenated amorphous silicon (a-Si:H) and hydrogenated amorphous silicon carbide (a-SiC:H) films were investigated to reveal an influence of the carbon content on the films properties in nanoscale. Thin a-Si:H and a-SiC:H films of different compositions were deposited by plasma enhanced chemical vapor deposition (PECVD) from SiH4 and SiH4 + CH4 gas mixtures. Raman spectroscopy and atomic force microscopy (AFM) were used to analyze the chemical bonds and morphology of the films. It was demonstrated that the carbon introduction in an amorphous network resulted not only in an increase of the optical bandgap of a-Si1–x C x :H films from E g = 1.72 eV at x = 0 to E g = 2.18 eV at x = 0.2, but also it led to a decrease of the effective sizes of nanoroughness on the film surfaces. The Raman scattering spectra verified that the amorphous network of a-SiC:H films even with low carbon content became less ordered at short and intermediate nanoscales.
No Reference information available - sign in for access.
No Citation information available - sign in for access.
No Supplementary Data.
No Article Media
No Metrics


Document Type: Research Article

Publication date: November 1, 2012

More about this publication?
  • Journal of Nanoelectronics and Optoelectronics (JNO) is an international and cross-disciplinary peer reviewed journal to consolidate emerging experimental and theoretical research activities in the areas of nanoscale electronic and optoelectronic materials and devices into a single and unique reference source. JNO aims to facilitate the dissemination of interdisciplinary research results in the inter-related and converging fields of nanoelectronics and optoelectronics.
  • Editorial Board
  • Information for Authors
  • Subscribe to this Title
  • Ingenta Connect is not responsible for the content or availability of external websites
  • Access Key
  • Free content
  • Partial Free content
  • New content
  • Open access content
  • Partial Open access content
  • Subscribed content
  • Partial Subscribed content
  • Free trial content
Cookie Policy
Cookie Policy
Ingenta Connect website makes use of cookies so as to keep track of data that you have filled in. I am Happy with this Find out more