A new gas sensor working in room temperature, which is compatible with silicon fabrication technology is presented. Porous silicon nanowires (NWs) were synthesized by metal-assisted chemical etching method and then TeO2 NWs branches were attached to their stem by thermal
evaporation of Te powders in the presence of air. Afterwards TeO2 branched porous Si NWs were functionalized by Pt via sputtering followed by low temperature thermal annealing. Scanning electron microscopy, transmission electron microscopy and energy-dispersive X-ray spectroscopy
collectively confirmed successful formation of TeO2 branched porous Si NWs functionalized by Pt nanoparticles. Their gas sensing properties in the presence of CO, C6H6 and C7H8 were tested at room temperature, for Si wafer, pristine porous
Si NWs, pristine TeO2 branched porous Si NWs, and Pt functionalized TeO2 branched porous Si NWs sensors. Pt functionalized TeO2 branched porous Si NWs have higher responses to all tested gases than the other sensors. The origin of high response is discussed
in detail. This new room temperature gas sensor can open a new aperture for development of gas sensors with minimum energy consumption which are compatible with silicon fabrication technology.
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Document Type: Research Article
Division of Materials Science and Engineering, Hanyang University, Seoul 133-791, Republic of Korea
The Research Institute of Industrial Science, Hanyang University, Seoul 133-791, Republic of Korea
Department of Materials Science and Engineering, Inha University, Incheon 402-751, Republic of Korea
Publication date: October 1, 2019
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Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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