A Low Frequency Vibration Energy Harvester Using ZnO Nanowires on Elastic Interdigitated Electrodes

This paper presents a low frequency piezoelectric vibration energy harvester using ZnO nanowires on elastic interdigitated electrodes. The interdigitated electrodes are formed using electroplated Ni and have suspended parts at the edges that are elastic and deformable by applying external force. A spherical Ni ball is used as a proof mass, which transforms a low frequency mechanical vibration into the force applied to deform the elastic electrodes. The ZnO nanowires are grown selectively on the electrodes and can generate a piezoelectric potential when the elastic electrodes are deformed by the proof mass activated by the external mechanical vibration. The proposed operation concept is demonstrated using two different types of energy harvesters, which have simple suspended part and cantilever array structures added to the electrodes, respectively. The output voltage of the fabricated harvesters is measured using a vibration exciter at 6 Hz sinusoidal vibration with an acceleration of 0.5 g. Maximum output power of 12.8 pW and 18.8 pW was generated with a load resistance of 1 MΩ for the harvesters using the simple suspended structure and cantilever array, respectively.