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Impact of Plasmonic Parameters on 7-nm Patterning in Plasmonic Computational Lithography

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For the wavelength reduction to overcome the diffraction limit of the optical lithography, the surface plasmon lithography (SPL) has lower cost and simpler system configuration than the extreme ultraviolet (EUV) lithography. In this paper, for the below 10-nm critical dimension (CD) as one of critical challenges in the lithography technology, SPL based on the SP interference and metamaterial in bowtie and hexahedron structures is proposed and demonstrated by using computer simulations such as the rigorous coupled-wave analysis (RCWA) method and the finite difference time domain (FDTD) method. For 193-nm wavelength, the minimum FWHM (the full width at half maximum) of the transverse magnetic (TM) intensity in xz plane (and yz plane) is 10-nm (and 7-nm) in a bowtie plasmonic structure. For hexahedron structures, the minimum 30-nm FWHM of TM intensity with 193-nm wavelength is improved to the minimum 16-nm FWHM by using metamaterial and SP interference.
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Keywords: LITHOGRAPHY SIMULATION; METAMATERIALS; NANO-SCALE PATTERNING; PLASMONIC LITHOGRAPHY; SURFACE PLASMON INTERFERENCE

Document Type: Research Article

Publication date: 01 October 2018

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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