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Investigation of Surface Properties of Fluorocarbon Films Produced Using Plasma Techniques

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Different fluorocarbon thin films were deposited on Si substrates using two different plasma polymerization methods. Fluorine-containing hydrophobic thin films were obtained using inductively coupled plasma (ICP) and capacitively coupled plasma (CCP) with a mixture of fluorocarbon precursors (C2F6, C3F8, or c-C4F8) and an unsaturated hydrocarbon (C2H2). Different process parameters for plasma polymerization (e.g., processing time) were used to generate various fluorocarbon thin films. The hydrophobic properties and mechanical properties of the new products were measured using a profilometer, water contact angle measurements, pencil hardness, and a 90° peel test. The chemical compositions of the fluorocarbon thin films were characterized using X-ray photoelectron spectroscopy (XPS) and Fourier transform infrared spectroscopy (FT-IR). The water contact angle results showed that the ICP technique provides a more hydrophobic surface compared to the CCP technique. XPS and FT-IR analyses indicated that the ICP technique generated more fluorine-related functional groups (i.e., CF-CF n , CF2, and CF3) in the surface region, while the CCP technique produced fewer fluorine-containing functional groups. However, the fluorocarbon thin films produced using the CCP technique showed greater adhesive strength than did the fluorocarbon thin films produced using the ICP technique. These results are useful to establish the optimal condition for the fabrication of fluorocarbon films and to develop the device in bio-sensing applications.
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Keywords: Adhesion; CCP; ICP; Plasma Polymerization; XPS

Document Type: Research Article

Affiliations: 1: Advanced Analysis Center, Korea Institute of Science and Technology, Seoul 02792, Korea 2: Green City Technology Institute, Korea Institute of Science and Technology, Seoul 02792, Korea

Publication date: September 1, 2018

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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