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The Effect of Precursor Composition on the Structural Properties of Nanocrystalline Diamond Films

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Nanocrystalline diamond (NCD) films were grown by hot filament CVD and the precursor composition dependence of the structural properties was examined. Films grown at 1 and 2 CH4 Vol% were found to be NCD layers with grain sizes of ~23–25 nm while films grown at 3–5 Vol% were identified as the mixtures of microcrystalline diamond and graphitic phase. The sp 2/sp 3 bonded carbon ratio in the grown films increased as the CH4 content increased up to 3 Vol% and then decreased beyond 4 Vol%. Microstructure and deposition rate were also found to be affected by the precursor composition and the NCD film grown at 1 CH4 Vol% showed a very dense microstructure and the highest deposition rate of ~3 nm/min.
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Keywords: Nanocrystalline Diamond; Precursor Composition; Structural Properties

Document Type: Research Article

Affiliations: 1: Department of Nano Fusion Technology, Pusan National University, Gyeongnam 50463, Korea 2: Department of Nanomechatronics Engineering, Pusan National University, Busan 46241, Korea 3: Department of Naval Architecture and Ocean Engineering, Pusan National University, Busan 46241, Korea 4: Global Core Research Center for Ships and Offshore Plants, Pusan National University, Busan 46241, Korea 5: Department of Materials Science and Engineering, Korean National University of Transportation, Chungbuk 27469, Korea

Publication date: March 1, 2018

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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