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The Effect of Post-Fabrication Annealing on an Amorphous IGZO Visible-Light Photodetector

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We demonstrate the effect of the thermal annealing temperature (250 and 300 °C) on the performance (photosensitivity and temporal photoresponse) of an amorphous indium-gallium-zinc-oxide (α-IGZO) photodetector based on the TFT structure to visible radiation. Analysis of photosensitivity was performed to assess various sensing parameters, such as photoresponsivity (R ph), threshold voltage (V TH) shift, and subthreshold swing (SS). The photosensitivity was improved as the wave-length of light decreased and the annealing temperature increased. This was analyzed based on in the activation energy for the ionization of an oxygen vacancy (V o) and the concentration of V o relation to the thermal annealing condition. The temporal photoresponse of the α-IGZO device are also presented. The photoresponse times improved as the annealing temperature increased, which was due to the increase in the concentration of V o functioning as a generation and recombination center with increasing annealing temperature.

Keywords: Amorphous IGZO; Oxygen Vacancy; Photodetector; Thermal Annealing

Document Type: Research Article

Affiliations: 1: School of Electronics and Electrical Engineering, Sungkyunkwan University, Suwon 440-746, Korea 2: School of Electrical Engineering, Korea University, Seoul 136-701, Korea 3: Division of Materials Science and Engineering, Hanyang University, Seoul 133-791, Korea

Publication date: November 1, 2016

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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