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Effect of Thermal Annealing in Vacuum and in Air on Nanograin Sizes in Hard and Superhard Coatings Zr–Ti–Si–N

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Zr–Ti–Si–N coating had high thermal stability of phase composition and remained structure state under thermal annealing temperatures reached 1180 °C in vacuum and 830 °C in air. Effect of isochronous annealing on phase composition, structure, and stress state of Zr–Ti–Si–N-ion-plasma deposited coatings (nanocomposite coatings) was reported. Below 1000 °C annealing temperature in vacuum, changing of phase composition is determined by appearing of siliconitride crystallites (β-Si3N4) with hexagonal crystalline lattice and by formation of ZrO2 oxide crystallites. Formation of the latter did not result in decay of solid solution (Zr, Ti)N but increased in it a specific content of Ti-component. Vacuum annealing increased sizes of solid solution nanocrystallites from (12 to 15) in as-deposited coatings to 25 nm after annealing temperature reached 1180 °C. One could also find macro- and microrelaxations, which were accompanied by formation of deformation defects, which values reached 15.5 vol.%. Under 530 °C annealing in vacuum or in air, nanocomposite coating hardness increased. When Ti and Si concentration increased and three phases nc-ZrN, (Zr, Ti)N-nc, and α-Si3N4 were formed, average hardness increased to 40.8±4 GPa. Annealing to 500 °C increased hardness and demonstrated lower spread in values H = 48±6 GPa and E = (456±78) GPa. Zr–Ti–Si–N coatings has high wear resistance and low friction coefficient in comparison at a temperature of 500 °C possess with coatings TiN, Ti–Si–N.
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Document Type: Research Article

Publication date: 01 December 2012

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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