Effect of Thermal Annealing in Vacuum and in Air on Nanograin Sizes in Hard and Superhard Coatings Zr–Ti–Si–N
Zr–Ti–Si–N coating had high thermal stability of phase composition and remained structure state under thermal annealing temperatures reached 1180 °C in vacuum and 830 °C in air. Effect of isochronous annealing on phase composition, structure, and stress state of Zr–Ti–Si–N-ion-plasma deposited coatings (nanocomposite coatings) was reported. Below 1000 °C annealing temperature in vacuum, changing of phase composition is determined by appearing of siliconitride crystallites (β-Si3N4) with hexagonal crystalline lattice and by formation of ZrO2 oxide crystallites. Formation of the latter did not result in decay of solid solution (Zr, Ti)N but increased in it a specific content of Ti-component. Vacuum annealing increased sizes of solid solution nanocrystallites from (12 to 15) in as-deposited coatings to 25 nm after annealing temperature reached 1180 °C. One could also find macro- and microrelaxations, which were accompanied by formation of deformation defects, which values reached 15.5 vol.%. Under 530 °C annealing in vacuum or in air, nanocomposite coating hardness increased. When Ti and Si concentration increased and three phases nc-ZrN, (Zr, Ti)N-nc, and α-Si3N4 were formed, average hardness increased to 40.8±4 GPa. Annealing to 500 °C increased hardness and demonstrated lower spread in values H = 48±6 GPa and E = (456±78) GPa. Zr–Ti–Si–N coatings has high wear resistance and low friction coefficient in comparison at a temperature of 500 °C possess with coatings TiN, Ti–Si–N.
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Document Type: Research Article
Publication date: 01 December 2012
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