Sub-60 nm Periodic Grating Feature Patterning by Immersion Based 364 nm Laser Interference
In this paper, we report a methodology to fabricate high resolution periodic grating features using high index prism based interferometer and i-line laser source. Features with sub-60 nm half pitch size were fabricated on i-line resist in an immersion medium using a prism of high index 1.939.
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Document Type: Research Article
Publication date: August 1, 2012
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