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Probe Based Surface Modification of Polymers Below 30 nm Pitch

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Heated probes are used to modify the surface of polymeric thin films by thermomechanical indentation and local evaporation of material. The resolution of the processes is discussed for probe-storage and surface patterning-applications. As storage densities exceed 1 Tbit/in2, the depth of the indents becomes comparable to the natural surface roughness of the polymer. By templating an atomically flat surface this limitation can be overcome, enabling storage densities of up to 4 Tbit/in2, corresponding to an indentation half-pitch of 7.5 nm.
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Keywords: DATA STORAGE; LITHOGRAPHY; POLYMERIC MATERIALS; SCANNING PROBE MICROSCOPY

Document Type: Research Article

Publication date: July 1, 2010

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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