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Manufacturing of Size Controlled a-Si:H Nanoparticles in Plasma Using Pulsed Hydrogen Gas

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We synthesized size controlled a-Si:H nanoparticles in plasma using a hydrogen gas pulse. An inductively-coupled plasma chamber with RF power (13.56 MHz) was designed for this study. Experiments were performed with various hydrogen pulse ON-times ranging between 0.1 to 0.9 seconds for 1 second periods. The size of the synthesized nanoparticles was measured and analyzed using electron microscopy, Scanning Mobility Particle Sizer (SMPS) and Image J software. We observed that the size of a-Si:H nanoparticles decreased when the hydrogen pulse ON-time was increased. The a-Si:H nanoparticles were found to be spherical in shape and uniform. For hydrogen pulse ON-time greater than 0.3 second, we observed agglomerated particles due to an increase in their concentration. We hope that these particles can be used as an alternative anode material for lithium ion secondary batteries.
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Keywords: A-SI:H NANOPARTICLES; HYDROGEN GAS PULSE; SECONDARY BATTERY; SIZE CONTROL

Document Type: Research Article

Publication date: December 1, 2009

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  • Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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