@article {Choi:2009:1533-4880:769,
title = "Measurement of Surface Adhesion Force of Adhesion Promoter and Release Layer for UV-Nanoimprint Lithography",
journal = "Journal of Nanoscience and Nanotechnology",
parent_itemid = "infobike://asp/jnn",
publishercode ="asp",
year = "2009",
volume = "9",
number = "2",
publication date ="2009-02-01T00:00:00",
pages = "769-773",
itemtype = "ARTICLE",
issn = "1533-4880",
eissn = "1533-4899",
url = "https://www.ingentaconnect.com/content/asp/jnn/2009/00000009/00000002/art00021",
doi = "doi:10.1166/jnn.2009.C021",
keyword = "NANOIMPRINT, SELF-ASSEMBLED MONOLAYERS (SAMS), MEASUREMENT OF ADHESION FORCE",
author = "Choi, Dae-Geun and Lee, Dong-Il and Kim, Ki-Don and Jeong, Jun-Ho and Choi, Jun-Hyuk and Lee, Eung-Sug",
abstract = "In this work, we investigated the effect of surface treatment as release layer and adhesion promoter for UV-Nanoimprint lithography and measured the surface adhesion force by using tensile separation force of Instron equipment. Several Self-Assembled Monolayers (SAMs) of 3-Acryloxypropyl
methyl dichlorosilane (APMDS) 3-Aminopropyl-triethoxysilane (APTS), and 3-Glycidoxypropyltrimethoxysilane (GPTS) as adhesion promoters and (1H,1H,2H,2H-perfluorooctyl)trichlorosilane (FOTS) as release layer were fabricated by vapor deposition method and were compared with oxygen plasma treatment.
APMDS could strongly improve the adhesion force between UV-curable acrylate resin and silicon substrate because of strong covalent bonding. Finally, we could successfully fabricate various imprint patterns by using proper surface treatment of SAMs.",
}