Carbon Nanotube Patterning with Capillary Micromolding of Catalyst
Patterning of multi-walled carbon nanotube (MWNT) in a plasma enhanced chemical vapor deposition (PECVD) chamber has been achieved by catalyst patterning using capillary micromolding process. Iron acetate catalyst nanoparticles were dissolved in ethanol and mold was fabricated with polydimethylsiloxane (PDMS). The ethanol solution containing catalyst nanoparticles was filled into the microchannel formed between PDMS mold and Si-wafer by capillary force. The capillary action of different solvents was simulated by commercial CFD-ACE+ simulation code to determine optimal solvents. Simulated result shows that the choice of solvent was critical in this capillary filling process. After the catalyst patterning, MWNT was grown at 700∼800 °C by PECVD process using CH4 and Ar gas in a scale of ∼10 micro-meters in a tubular inductively coupled plasma reactor. Grown CNTs were analyzed by FE-SEM and Raman Spectroscopy.
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Document Type: Research Article
Publication date: November 1, 2007
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- Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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