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Parametric Analysis of Piezoelectric Resonances of AlN Layouts for Vibrating Energy Harvesting

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In this paper, we perform an accurate parametric analysis of piezoelectric cantilevers for micro-scale vibrating energy harvesting applications. The presented model considers the electromechanical coupled equations including the losses due to the damping effect and losses of internal frictions. By assuming an in-phase sinusoidal source as external applied vibration force, the model studies the best electromechanical efficiency by analysing the optimal load resistance for a piezoelectric aluminum nitride (AlN) cantilever operating around 1100 Hz. The approach of the model allows to define the design criteria for efficient vibrating energy harvesting AlN cantilevers according with the actual technology. The model is extended to ring layouts able to work at lower frequencies.
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Keywords: ANALYTICAL MODELING; CANTILEVER; DAMPING LOSSES; ENERGY HARVESTING; INTEGRATED HARVESTING SYSTEM; MEMS

Document Type: Research Article

Publication date: November 1, 2011

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  • Journal of Computational and Theoretical Nanoscience is an international peer-reviewed journal with a wide-ranging coverage, consolidates research activities in all aspects of computational and theoretical nanoscience into a single reference source. This journal offers scientists and engineers peer-reviewed research papers in all aspects of computational and theoretical nanoscience and nanotechnology in chemistry, physics, materials science, engineering and biology to publish original full papers and timely state-of-the-art reviews and short communications encompassing the fundamental and applied research.
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