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Effects of Lateral Contact Stiffness and Geometrical Parameters on Torsional Sensitivity of Vibration Modes of Rectangular Atomic Force Microscopy Cantilevers with Sidewall

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Effects of sidewall and geometrical parameters and lateral contact stiffness on torsional sensitivity of vibration modes of rectangular AFM cantilevers are analyzed. When the normal contact stiffness (βt ) increases the sensitivity of the first mode slowly decreases then rapidly decreases as the normal contact stiffness, increases approximately for βt > 0.1. Results also indicate the first mode is more sensitive than other high-order modes. AFM without sidewall probe is more sensitive than the AFM with sidewall probe, especially and for high order modes. Results shows that AFM with higher sidewall length is more sensitive than AFM with lower sidewall length for βt < 10 and vise versa for βt > 100. It is seen increasing the horizontal cantilever probe lengths increased the sensitivity. AFM with lower cross section width has lower torsional sensitivity. Also as cross section width of the cantilever probe thickness increases the torsional sensitivity decreases.
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Keywords: AFM; NANOLITHOGRAPHY; SIDEWALL SCANNING; VIBRATION RESPONSE

Document Type: Research Article

Publication date: July 1, 2011

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  • Journal of Computational and Theoretical Nanoscience is an international peer-reviewed journal with a wide-ranging coverage, consolidates research activities in all aspects of computational and theoretical nanoscience into a single reference source. This journal offers scientists and engineers peer-reviewed research papers in all aspects of computational and theoretical nanoscience and nanotechnology in chemistry, physics, materials science, engineering and biology to publish original full papers and timely state-of-the-art reviews and short communications encompassing the fundamental and applied research.
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