Fabrication of Microfluidically-Accessible Planar Nanoholes on Elastomeric Substrates

Here we present two novel fabrication techniques for creating planar nanohole devices designed for making measurements or delivering soluble compounds to a number of single cells simultaneously. The devices are micromolded in poly(dimethylsiloxane) (PDMS). In both designs presented here, the nanoholes are arranged in a linear array on a flat surface; each nanohole constitutes a fluidic connection or nanochannel between two volumes, one above the surface and a microfluidic channel beneath the surface dedicated to that nanohole. Cells can be immobilized and cultured on the planar array surface either directly on top of the nanoholes or in close proximity. The integration of nanochannels at the terminal end of an underlying microchannel network provides nanometer-scale precision and favorable optical properties while allowing for low fluidic and electrical resistance.