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208 articles with title/keywords/abstract containing Plasma-enhanced chemical vapor deposition (PECVD)

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Construction of Protein-Resistant pOEGMA Films by Helicon Plasma-Enhanced Chemical Vapor Deposition

Authors: Lee, Bong Soo; Yoon, Ok Ja; Cho, Woo Kyung; Lee, Nae-Eung; Yoon, Kuk Ro; Choi, Insung S.

Source: Journal of Biomaterials Science, Polymer Edition, Volume 20, Number 11, 2009 , pp. 1579-1586(8)

Publisher: VSP, an imprint of Brill

The Variation of Surface Contact Angles According to the Diameter of Carbon Nanotubes

Authors: Choi, Eun Chang; Choi, Won Seok; Hong, Byungyou

Source: Journal of Nanoscience and Nanotechnology, Volume 9, Number 6, June 2009 , pp. 3805-3809(5)

Publisher: American Scientific Publishers

Photoluminescence of Silicon Nanocrystals Embedded in Silicon Oxide

Authors: Wong, C.K.; Wong, Hei; Filip, V.

Source: Journal of Nanoscience and Nanotechnology, Volume 9, Number 2, February 2009 , pp. 1272-1276(5)

Publisher: American Scientific Publishers

Effects of gas temperature on optical and transport properties of a-Si:H films deposited by PECVD

Authors: Liao, N. -M.; Li, W.; Jiang, Y. -D.; Wu, Z. -M.; Qi, K. -C.; Li, S. -B.

Source: Philosophical Magazine, Volume 88, Number 25, September 2008 , pp. 3051-3057(7)

Publisher: Taylor and Francis Ltd

Preparation of Antimony Films by Cyclic Pulsed Chemical Vapor Deposition

Authors: Kim, Yeon-Hong; Lim, Gyeong Taek; Kim, Bo-Hye; Ko, Hang Ju; Woo, Hee-Gweon; Kim, Do-Heyoung

Source: Journal of Nanoscience and Nanotechnology, Volume 8, Number 10, October 2008 , pp. 4972-4975(4)

Publisher: American Scientific Publishers

Fabrication of Vertical Carbon Nanotube Arrays from Self-Assembled Block Copolymer Films

Authors: Lee, Duck-Hyun; Shin, Dong-Ok; Lee, Won-Jong; Kim, Sang Ouk

Source: Journal of Nanoscience and Nanotechnology, Volume 8, Number 10, October 2008 , pp. 5571-5575(5)

Publisher: American Scientific Publishers

Effects of Feed Gas Composition and Catalyst Thickness on Carbon Nanotube and Nanofiber Synthesis by Plasma Enhanced Chemical Vapor Deposition

Authors: Garg, R.K.; Kim, S.S.; Hash, D.B.; Gore, J.P.; Fisher, T.S.

Source: Journal of Nanoscience and Nanotechnology, Volume 8, Number 6, June 2008 , pp. 3068-3076(9)

Publisher: American Scientific Publishers

Low Temperature Synthesis of Single-Walled Carbon Nanotubes in an Inductively Coupled Plasma Chemical Vapor Deposition System

Authors: Weng, Cheng-Hui; Yang, Chao-Shun; Lin, Hsuan; Tsai, Chuen-Horng; Leou, Keh-Chyang

Source: Journal of Nanoscience and Nanotechnology, Volume 8, Number 5, May 2008 , pp. 2526-2533(8)

Publisher: American Scientific Publishers

Luminescence Tuning of Amorphous Si Quantum Dots Prepared by Plasma-Enhanced Chemical Vapor Deposition

Authors: Kang, S.M.; Yoon, S.G.; Kim, S.W.; Yoon, D.H.

Source: Journal of Nanoscience and Nanotechnology, Volume 8, Number 5, May 2008 , pp. 2540-2543(4)

Publisher: American Scientific Publishers

Ge nanoclusters in PECVD-deposited glass caused only by heat treatment

Authors: Ou, H.; Rørdam, T.P.; Rottwitt, K.; Grumsen, F.; Horsewell, A.; Berg, R.W.; Shi, P.

Source: Applied Physics B, Volume 91, Number 1, April 2008 , pp. 177-181(5)

Publisher: Springer

Ge nanoclusters in PECVD-deposited glass after heat treatment and electron-beam irradiation

Authors: Ou, H.; Rørdam, T.P.; Rottwitt, K.; Grumsen, F.; Horsewell, A.; Berg, R.W.

Source: Applied Physics B, Volume 87, Number 2, April 2007 , pp. 327-331(5)

Publisher: Springer

Understanding the Effects of Stress on the Crystallization of Amorphous Silicon

Authors: Cai, Li; Zou, Min; Abu-Safe, Husam; Naseem, Hameed; Brown, William

Source: Journal of Electronic Materials, Volume 36, Number 3, March 2007 , pp. 191-196(6)

Publisher: Springer

Diamond Growth on a Si Substrate With Ceramic Interlayers

Authors: Li, Y. S.; Xiao, C.; Hirose, A.; Yang, Q.; Shimada, S.

Source: Journal of the American Ceramic Society, Volume 90, Number 5, May 2007 , pp. 1427-1433(7)

Publisher: Blackwell Publishing

Application of PECVD SiC in glass micromachining

Authors: Zhang, Haixia; Guo, Hui; Chen, Zhe; Zhang, Guobing; Li, Zhihong

Source: Journal of Micromechanics and Microengineering, Volume 17, Number 4, April 2007 , pp. 775-780(6)

Publisher: Institute of Physics Publishing

Magnetic alloys in nanoscale biomaterials

Authors: Leventouri, T.; Melechko, A.; Sorge, K.; Klein, K.; Fowlkes, J.; Rack, P.; Anderson, I.; Thompson, J.; McKnight, T.; Simpson, M.

Source: Metallurgical and Materials Transactions A, Volume 37, Number 12, December 2006 , pp. 3423-3427(5)

Publisher: Springer

The effects of hydrogen on aluminum-induced crystallization of sputtered hydrogenated amorphous silicon

Authors: Hossain, Maruf; Abu-Safe, Husam; Naseem, Hameed; Brown, William

Source: Journal of Electronic Materials, Volume 35, Number 1, January 2006 , pp. 113-117(5)

Publisher: Springer

Effects of a-Si:H resist vacuum-lithography processing on HgCdTe

Authors: Jacobs, R.; Robinson, E.; Jaime-Vasquez, M.; Stoltz, A.; Markunas, J.; Almeida, L.; Boyd, P.; Dinan, J.; Salamanca-Riba, L.

Source: Journal of Electronic Materials, Volume 35, Number 6, June 2006 , pp. 1474-1480(7)

Publisher: Springer

Influence of Substrate Temperature on the Properties of Fluorinated Silicon-Nitride Thin Films Deposited by IC-RPECVD

Authors: Fandiño, J.; López-Suárez; Monroy, B.M.; Santana, G.; Ortiz, A.; Alonso, J.C.; Oliver, A.

Source: Journal of Electronic Materials, Volume 35, Number 7, July 2006 , pp. 1552-1557(6)

Publisher: Springer

Growth of Silicon Nanoclusters on Different Substrates by Plasma Enhanced Chemical Vapor Deposition

Authors: Monroy, B.M.; Santana, G.; Fandiño, J.; Ortiz, A.; Alonso, J.C.

Source: Journal of Nanoscience and Nanotechnology, Volume 6, Number 12, December 2006 , pp. 3752-3755(4)

Publisher: American Scientific Publishers

Development of a low temperature MEMS process with a PECVD amorphous silicon structural layer

Authors: Chang, Stella; Sivoththaman, Siva

Source: Journal of Micromechanics and Microengineering, Volume 16, Number 7, July 2006 , pp. 1307-1313(7)

Publisher: Institute of Physics Publishing

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