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Investigations on PECVD boron carbonitride layers by means of ERDA, XPS and nano-indentation measurements

Authors: Thamm, Thomas; Wett, Daniel; Bohne, Wolfgang; Strub, Erik; Röhrich, Jörg; Szargan, Rüdiger; Marx, Günter; Goedel, Werner A.

Source: Microchimica Acta, Volume 156, Numbers 1-2, November 2006 , pp. 53-56(4)

Publisher: Springer

Patterning of diamond microstructures on Si substrate by bulk and surface micromachining

Authors: Fu Y.; Du H.; Miao J.

Source: Journal of Materials Processing Technology, Volume 132, Number 1, 10 January 2003 , pp. 73-81(9)

Publisher: Elsevier

From diamond to crystalline silicon carbonitride: effect of introduction of nitrogen in CH₄/H₂ gas mixture using MW-PECVD

Authors: Fu Y.; Sun C.Q.; Du H.; Yan B.

Source: Surface and Coatings Technology, Volume 160, Number 2, 22 October 2002 , pp. 165-172(8)

Publisher: Elsevier

Versatile microwave PECVD technique for deposition of DLC and other ordered carbon nanostructures

Authors: Kumar S.; Rauthan C.M.S.; Dixit P.N.; Srivatsa K.M.K.; Khan M.Y.; Bhattacharyya R.

Source: Vacuum, Volume 63, Number 3, 2 August 2001 , pp. 433-439(7)

Publisher: Elsevier

Synthesis of multi-walled carbon nanotubes by microwave plasma-enhanced chemical vapor deposition

Authors: Wang X.; Hu Z.; Wu Q.; Chen X.; Chen Y.

Source: Thin Solid Films, Volume 390, Number 1, 30 June 2001 , pp. 130-133(4)

Publisher: Elsevier

Preparation of carbon nanotubes and nano-particles by microwave plasma-enhanced chemical vapor deposition

Authors: Wang X.; Hu Z.; Chen X.; Chen Y.

Source: Scripta Materialia, Volume 44, Number 8, 18 May 2001 , pp. 1567-1570(4)

Publisher: Elsevier

Si-containing crystalline carbon nitride derived from microwave plasma-enhanced chemical vapor deposition

Authors: Chen L.C.; Chen K.H.; Chen C.K.; Bhusari D.M.; Yang C.Y.; Lin M.C.; Huang Y.F.; Chuang T.J.

Source: Thin Solid Films, Volume 303, Number 1, 15 July 1997 , pp. 66-75(10)

Publisher: Elsevier