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1,975 articles with title/keywords/abstract containing LITHOGRAPHY

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Singapore Synchrotron Light Source

Author: Moser, Herbert

Source: Synchrotron Radiation News, Volume 22, Number 4, July 2009 , pp. 23-28(6)

Publisher: Taylor and Francis Ltd

Integration of one-dimensional nanostructures with microsystems: an overview

Author: Erdem Alaca, B

Source: International Materials Reviews, Volume 54, Number 5, September 2009 , pp. 245-282(38)

Publisher: Maney Publishing

Free Content Lithography-Free Fabrication of Large Area Subwavelength Antireflection Structures Using Thermally Dewetted Pt/Pd Alloy Etch Mask

Authors: Lee, Youngjae; Koh, Kisik; Na, Hyungjoo; Kim, Kwanoh; Kang, Jeong-Jin; Kim, Jongbaeg

Source: Nanoscale Research Letters, Volume 4, Number 4, April 2009 , pp. 364-370(7)

Publisher: Springer

AFM lithography and fabrication of multifunctional nanostructures with perovskite oxides

Author: Li, Run-Wei

Source: International Journal of Nanotechnology, Volume 6, Number 12, 17 September 2009 , pp. 1067-1085(19)

Publisher: Inderscience Publishers

Particle Cleaning of EUV Reticles

Authors: Scaccabarozzi, Luigi; Lammers, Niels A.; Moors, Roel; Banine, Vadim

Source: Journal of Adhesion Science and Technology, Volume 23, Number 12, 2009 , pp. 1603-1622(20)

Publisher: VSP, an imprint of Brill

Fabrication of Novel Transparent Inorganic Polymer Derived Microchannels and Application for Photopolymerization

Authors: Min, Kyoung-Ik; Park, Jun-Hong; Hong, Lan-Young; Kim, Dong-Pyo

Source: Journal of Nanoscience and Nanotechnology, Volume 9, Number 12, December 2009 , pp. 7215-7219(5)

Publisher: American Scientific Publishers

Selective Protein Patterning Based on the Micro-Structured Organosilane Self-Assembled Monolayer by Vacuum Ultraviolet Light Lithography

Authors: Lim, Sung-Hyuk; Yamaguchi, Munehiro; Nishimura, Okio; Mie, Yasuhiro; Tamura, Tomohiro; Kim, Byung-Woo; Suzuki, Masaaki

Source: Journal of Nanoscience and Nanotechnology, Volume 9, Number 12, December 2009 , pp. 7318-7323(6)

Publisher: American Scientific Publishers

Fabrication of three-dimensional photonic crystals by interference lithography with low light absorption

Authors: Miklyaev, Yu.V.; Karpeev, S. V.; Dyachenko, P. N.; Pavelyev, V. S.

Source: Journal of Modern Optics, Volume 56, Number 9, May 2009 , pp. 1133-1136(4)

Publisher: Taylor and Francis Ltd

Variance component analysis based fault diagnosis of multi-layer overlay lithography processes

Authors: Yu, Jie; Qin, S. Joe

Source: IIE Transactions, Volume 41, Number 9, September 2009 , pp. 764-775(12)

Publisher: Taylor and Francis Ltd

Submerged Nanocontact Printing (SnCP) of Thiols

Authors: Caballero, David; Samitier, Josep; Errachid, Abdelhamid

Source: Journal of Nanoscience and Nanotechnology, Volume 9, Number 11, November 2009 , pp. 6478-6482(5)

Publisher: American Scientific Publishers

Single ZnO Nanowire Based High-Performance Field Effect Transistors (FETs)

Authors: Park, Yong Kyu; Umar, Ahmad; Kim, Jin-Seok; Yang, H.Y.; Lee, Jeong Su; Hahn, Yoon-Bong

Source: Journal of Nanoscience and Nanotechnology, Volume 9, Number 10, October 2009 , pp. 5839-5844(6)

Publisher: American Scientific Publishers

On the design of a monitoring system for desktop micro-milling machines

Authors: Stavropoulos, P.; Stournaras, A.; Chryssolouris, G.

Source: International Journal of Nanomanufacturing, Volume 3, Numbers 1-2, 13 July 2009 , pp. 29-39(11)

Publisher: Inderscience Publishers

Study on residual resist layer thickness measurement for Nanoimprint Lithography based on near-field optics

Authors: Takahashi, Satoru; Minamiguchi, Shuichi; Nakao, Toshiyuki; Usuki, Shin; Takamasu, Kiyoshi

Source: International Journal of Surface Science and Engineering, Volume 3, Number 3, 20 June 2009 , pp. 178-194(17)

Publisher: Inderscience Publishers

Development of novel integrated bio/chemical sensor systems using chalcogenide glass materials

Authors: Petit, Laeticia; Carlie, Nathan; Zdyrko, Bodgan; Luzinov, Igor; Richardson, Kathleen; Hu, Juejun; Agarwal, Anu; Kimerling, Lionel; Anderson, Troy; Richardson, Martin

Source: International Journal of Nanotechnology, Volume 6, Number 9, 24 June 2009 , pp. 799-815(17)

Publisher: Inderscience Publishers

Gas-Assisted Nanoparticle Fluid Magnetic Imprinting Technology in Micro-Lens Manufacture and the Application of Projection Lithography

Authors: Weng, Yung-Jin; Weng, Yung-Chun; Fang, Huang-Sheng; Ke, Chih-Yu; Yang, Sen-Yeu

Source: Polymer-Plastics Technology and Engineering, Volume 48, Number 5, May 2009 , pp. 549-553(5)

Publisher: Taylor and Francis Ltd

Recent Patents in Magnetic Fluid Seals and Applications

Authors: Cong, Ming; Dai, Penglei; Shi, Huili

Source: Recent Patents on Engineering, Volume 3, Number 2, June 2009 , pp. 82-96(15)

Publisher: Bentham Science Publishers

In-Situ Negatively Nanopatterning Alkylated Silicon (111) Surface by Conductive Atomic Force Microscope

Authors: Wang, Haitao; Zhang, Yong; Tian, Tian; Xiao, Zhongdang

Source: Journal of Nanoscience and Nanotechnology, Volume 9, Number 8, August 2009 , pp. 4618-4622(5)

Publisher: American Scientific Publishers

Thermal Imprinting of Nano-Patterns Using Thiol-Based Self-Assembled Monolayer-Treated Nickel Template

Authors: Byeon, Kyeong-Jae; Hwang, Seon-Yong; Yang, Ki-Yeon; Lee, Heon

Source: Journal of Nanoscience and Nanotechnology, Volume 9, Number 7, July 2009 , pp. 4103-4107(5)

Publisher: American Scientific Publishers

Fabrication of 70 nm-Sized Zero Residual Polymer Patterns by Thermal Nanoimprint Lithography

Authors: Yang, Ki-Yeon; Kim, Jong-Woo; Byeon, Kyeong-Jae; Lee, Hee-Chul; Lee, Heon

Source: Journal of Nanoscience and Nanotechnology, Volume 9, Number 7, July 2009 , pp. 4194-4196(3)

Publisher: American Scientific Publishers

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