Self-Catalytic and Selective Growth of ZnO Nanoneedles by Micro-Contact Printing and CVD

A self-catalytic method to selectively grow ZnO nanoneedles is demonstrated by simply combining a conventional micro-contact printing (μ-CP) and two-step metal-organic chemical vapor deposition (MOCVD) techniques. Self-assembled monolayers (SAMs) of octadecyltrichlorosilane (OTS) were patterned on Si substrates by μ-CP. The patterned structures of the ZnO nanoneedles were realized on the SAMs-patterned Si substrates by two-step MOCVD at high temperature of 600 °C via the initial preparation of a thin ZnO seed layer with retaining the patterned morphology at low temperature of 170 °C. This combined method of μ-CP and self-catalytic two-step MOCVD should be applicable to fabricate the patterned alignments of metal oxide nanostructures.