Cubic SiC Nano-Thin Films and Nano-Wires: High Vacuum Metal-Organic Chemical Vapor Deposition, Surface Characterization, and Application Tests
Single-crystalline and epitaxial cubic silicon carbide (β-SiC) nano-thin films have been deposited on Si(100) substrates at a sample temperature of ∼900 °C using single source precursors by the thermal metal-organic chemical vapor deposition (MOCVD) method. Diethylmethylsilane
and 1,3-disilabutane, which contain Si and C atoms in the same molecule, were used as precursors without any carrier or bubbler gas. Upon increasing the deposition temperature from 900 to 950 °C, β-SiC nano-thin films with relatively small crystals and smoother surfaces were
created on Si(100) substrates. Moreover, β-SiC nano-wires with 40∼100 nm in diameter have also been grown selectively on nickel catalyzed Si(100) substrates with dichloromethylvinylsilane by the MOCVD method. The deposition temperature in this case was as low as 800 °C
under the pressure of 5.0 × 10−2 Torr. It is worth noting that the initial growth rates of deposited β-SiC nano-thin films and nano-wires strongly depend on the deposition temperature rather than the time. In order to test the possibility of applications
of these materials for electronic components such as field emitter, MEMS, and high-power transistor, we fabricated the nanoelectronic devices using both β-SiC nano-wires and nano-thin films. With these preliminary application tests, it is expected that SiC nanowires can be used
as field emitter and nanoelectronic high-power transistor, and application of the SiC nano-thin films to MEMS is promising as well.
Keywords: MOCVD; SIC NANOWIRE; SIC THIN FILM
Document Type: Research Article
Publication date: 01 October 2008
- Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
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