A Chemocapacitive Sensor Array System for Gas Sensing Applications
A chemical sensor array based on interdigitated capacitors and a dedicated electronic readout module has been fabricated and tested for the detection of gases. The interdigitated electrodes were fabricated with conventional microelectronic technologies and coated with thin polymeric
films through a sequence of photolithographic steps. The electronic interface is built around a commercial capacitance to voltage chip and analog to digital converter. The developed system was successfully applied in the detection of humidity, methanol and their binary mixture and its performance
was compared with the measurements obtained by a precision capacitance meter.
Keywords: CAPACITIVE CHEMICAL SENSORS; CAPACITIVE INTERFACE; POLYMER FILMS
Document Type: Research Article
Publication date: 01 April 2011
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