High Frequency Characteristics of Fe65Co35 Alloy Cluster-Assembled Films Prepared by Energetic Cluster Deposition
Size-monodispersed Fe65 Co35 alloy clusters whose average sizes ranged from 7 to 12 nm were produced by a plasma-gas-condensation (PGC)-type cluster deposition apparatus. Fe65Co35 alloy cluster-assembled films were further prepared at room
temperature by energetic cluster deposition method. Positively charged clusters in a cluster beam were accelerated electrically and deposited onto a negatively biased substrate together with neutral clusters from the same cluster source, leading to the formation of a high-density Fe65Co35
alloy cluster-assembled films with good soft magnetic properties. High frequency magnetic characteristics of these films were studied at room temperature using a high-frequency permeameter (RMF-3000, Ryowa). The real part (μ′) of permeability for the Fe65Co35
alloy cluster-assembled films prepared at bias voltage V
a = −20 kV has a large value of μ′ = 135 at f = 1.5 GHz, and imaginary part (μ″) of permeability has a maximum (μ″ ≈ 190) at about 2.5 GHz.
Keywords: CLUSTER-ASSEMBLED FILM; ENERGETIC CLUSTER DEPOSITION; FE65 CO35 CLUSTER; HIGH FREQUENCY CHARACTERISTICS; PERMEABILITY
Document Type: Research Article
Publication date: 01 December 2011
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