The Influences of Rapid-Thermal Annealing on the Characteristics of Sr0.6Ba0.4Nb2O6 Thin Film
The Sr0.6Ba0.4Nb2O6 (SBN) thin films were successfully prepared on Pt/Ti/Si and SiO2/Si/Al substrates and crystallized subsequently using rapid thermal annealing (RTA) process in ambient atmosphere for 1 min. The surface morphologies
and thicknesses of as-deposited and annealed SBN thin films were characterized by field emission scanning electron microscopy, and the thickness was about 246 nm. As compared with the as-deposited SBN thin films, the RTA-treated process had improved the crystalline structures and also had
large influence on the crystalline orientation. When the annealing temperatures increased from 700 °C to 900 °C, the diffraction intensities of (410) and (001) peaks apparently increased. Annealed at 900 °C, the (001) peak had the maximum texture coefficient and SBN thin films
showed a highly c-axis (001) orientation. The influences of different RTA-treated temperatures on the polarization–applied electric field (P–E) curves and the capacitance–voltage (C–V) curves were also investigated.
Keywords: DEFECT LEVEL; RAPID THERMAL ANNEALING; SR0.6BA0.4NB2O6 THIN FILMS; TEXTURE COEFFICIENT
Document Type: Research Article
Publication date: 01 December 2011
- Journal for Nanoscience and Nanotechnology (JNN) is an international and multidisciplinary peer-reviewed journal with a wide-ranging coverage, consolidating research activities in all areas of nanoscience and nanotechnology into a single and unique reference source. JNN is the first cross-disciplinary journal to publish original full research articles, rapid communications of important new scientific and technological findings, timely state-of-the-art reviews with author's photo and short biography, and current research news encompassing the fundamental and applied research in all disciplines of science, engineering and medicine.
- Editorial Board
- Information for Authors
- Subscribe to this Title
- Terms & Conditions
- Ingenta Connect is not responsible for the content or availability of external websites
- Access Key
- Free content
- Partial Free content
- New content
- Open access content
- Partial Open access content
- Subscribed content
- Partial Subscribed content
- Free trial content