Nanomachining by Rubbing at Ultrasonic Frequency Under Controlled Shear Force

This study proposes a new method of proximal-probe machining that uses a rubbing process by introducing concentrated-mass (CM) cantilevers. At the second resonance of the CM cantilever vibration, the tip site of the cantilever becomes a node of the standing deflection wave because of the sufficient inertia of the attached concentrated mass. The tip makes a cyclic motion that is tangential to the sample surface, not vertical to it, as in a tapping motion. This lateral tip motion that is selectively excited by CM cantilevers was effective for the material modification of a sample due to the friction between the tip and the sample. Imaging and nanomachining under controlled shear force were demonstrated by means of the modified cantilever and a normal atomic force microscope. We were able to write a micron-sized letter "Z" having a line width of 30–100 nm on a resin surface.