Local Anodic Oxidation Patterning of Au Deposited Si Surfaces
Nanopatterning of Si(100) surfaces deposited with Au films from physical and chemical methods, has been carried out using a AFM set up mounted with a conducting tip. At a tip bias of −12 V, the LAO patterns drawn on various Au/SiO
x
surfaces have been compared
with those on bare Si. The height of the oxide patterns is several times higher in the case of Au covered Si surfaces compared to patterns on bare Si surface. The enhancement in LAO is related to the catalytic activity of Au nanoparticulates at SiO
x
interface.
Keywords: AFM; GOLD CATALYSIS; LAO; NANOPARTICLES; NANOPATTERNING
Document Type: Research Article
Publication date: 01 September 2009
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