Fabrication and characterization of multi-component organosilane nanofilms

Authors: Takahara A.; Sakata H.; Morita M.; Koga T.; Otsuka H.

Source: Composite Interfaces, Volume 10, Numbers 4-5, 2003 , pp. 489-504(16)

Publisher: VSP, an imprint of Brill

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Abstract:

Multi-component micropatterned organosilane monolayers are fabricated on a Si-wafer substrate by stepwise site-specific vacuum ultraviolet (VUV)-ray photodecomposition and chemisorption. The introduction of different organosilane components is confirmed by X-ray photoelectron spectroscopy (XPS). Atomic force microscopic and lateral force microscopic observations reveal that the line-widths of the micropatterned surface correspond to those of the photomask. Contact angle measurement reveals that the micropatterning of the surface functional groups influences the magnitudes of surface free energy. A line pattern with high wetting contrast shows anisotropic water condensing behavior. Also, the patterned surface is used for the site-specific polymerization and site-specific adsorption of microparticles.
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