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Aluminum Oxide Doped with Erbium, Titanium and Chromium for Active Integrated Optical Applications

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Amorphous thin films with very low attenuation are grown by MO-PECVD. The modifications due to the annealing condition are subject of investigations. Aluminum oxide waveguides are doped with erbium for applications in telecommunication to develop an integrated optical amplifier. Also Al2O3 doped with transition elements to develop tunable solid state lasers for spectroscopic measurements is of interest. Lasers with broadest fluorescence bands are Ti:Sapphire lasers or chromium doped specific crystals or glasses. In this paper the suitability of titanium and chromium doped aluminum oxide material as laser material is examined. Titanium and chromium doped waveguides have been annealed. Their fluorescence and lifetime measurements are presented.

Keywords: Aluminum oxide; Chromium; Doping; Erbium; Integrated optics; MO-PECVD; Titanium

Document Type: Original Article


Affiliations: 1: Technische Universität Hamburg-Harburg, Abt. Mikrosystemtechnik, Eißendorfer Str. 42, 21073 Hamburg, Germany 2: Alcatel Stuttgart, Germany

Publication date: October 1, 2001


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