Plasmatron with Microwave Excitation of Nonequilibrium Plasma

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Testing results of a microwave plasma generator (plasmatron) intended for excitation of a strongly nonequilibrium plasma are presented. Nonequilibrium properties of the plasma are described in detail. The plasma flame is formed at an open end of a coaxial line under atmospheric pressure. Argon is used as plasma forming gas, and a 10 GHz CW magnetron with 10 W output power is used for plasma excitation. The efficiency of absorption of microwave power in the plasma is higher than 90% with specific absorbing capacity of 0,4...4 kW/cm3.

Keywords: Microwave plasma generator; Non-equilibrium properties

Document Type: Original Article


Affiliations: 1: Institute of Radio Physics and Electronics, 12 Ac. Proskury St., 61085 Kharkov, Ukraine 2: Technical University Hamburg-Harburg, Institute of Microwave Engineering, Denickestrasse 22, D-21073 Hamburg, Germany. E-mail:

Publication date: October 1, 2001

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