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Squeeze film damping effect on switching time of a MOEMS optical switch

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This paper presents theoretical analysis for the effect of air squeeze film damping on a MOEMS optical switch with the slant lower electrode. Analytical formulae are derived for the squeeze film damping coefficient and the squeeze film damping torque on the cantilever beam of the optical switch. According to solving the dynamic equation, the effect of the air squeeze film damping on the switching time is analyzed. There are discrepancies of 0.15 ms and 0.80 ms for the switching time T off and T on, respectively, without considering the squeeze film damping. Therefore the effect of the air squeeze film damping on T on is more obvious than that on T off.
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Document Type: Research Article

Affiliations: State Key Laboratory on Integrated Optoelectronics, Jilin University, Jilin Changchun 130023, China

Publication date: 2004-10-01

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