Height/width aspect ratio controllable two-dimensional sub-micron arrays fabricated with two-photon photopolymerization
Abstract:We reported in this paper the use of annular beam illumination to control the transverse and vertical sizes of two-dimensional dot array structures fabricated with two-photon photopolymerization. Dot arrays with an element diameter of less than 300 nm, a lattice spacing less than 1 μm has been produced. At the same time, the structure height exhibits a 1.94 times increase averagely and the height/width aspect ratio is improved from 1.21, for the circular beam illumination case, to 2.76 after using annular beam illumination.
Document Type: Research Article
Affiliations: Centre for Micro-Photonics, School of Biophysical Sciences and Electrical Engineering, Swinburne University of Technology, P.O. Box 218 Hawthorn, 3122 Australia
Publication date: 2004-10-01