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Height/width aspect ratio controllable two-dimensional sub-micron arrays fabricated with two-photon photopolymerization

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We reported in this paper the use of annular beam illumination to control the transverse and vertical sizes of two-dimensional dot array structures fabricated with two-photon photopolymerization. Dot arrays with an element diameter of less than 300 nm, a lattice spacing less than 1 μm has been produced. At the same time, the structure height exhibits a 1.94 times increase averagely and the height/width aspect ratio is improved from 1.21, for the circular beam illumination case, to 2.76 after using annular beam illumination.

Document Type: Research Article

DOI: http://dx.doi.org/10.1078/0030-4026-00370

Affiliations: Centre for Micro-Photonics, School of Biophysical Sciences and Electrical Engineering, Swinburne University of Technology, P.O. Box 218 Hawthorn, 3122 Australia

Publication date: October 1, 2004

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