Optimization of white light interferometry on rough surfaces based on error analysis
Abstract:White light interferometry can be used to measure the shape of rough surfaces. At rough surfaces, the measuring uncertainty in principle cannot be better than the surface roughness, which is commonly in the range of 1 micron. Hence, the requirements for the hard- and software components of the instrument are not as high as for interferometry in the nanometer regime. An analysis of the dominant error sources allows the design of an “optimal” sensor with a measuring uncertainty as small as physically possible, with components as good as necessary and as simple as possible.
Document Type: Research Article
Affiliations: 1: Department of Electronics Engineering, Gebze Institute of Technology, Istanbul C. 101, 41400 Cayįrova, Kocaeli, Turkey 2: Institute for Optics, Information and Photonics, University of Erlangen, Staudtstraße 7/B2, 91058 Erlangen, Germany
Publication date: October 1, 2004