Transverse spatial phase-shifting method used in vibration-compensated interferometer
Abstract:Based on the conception of temporal phase-shifting interferometry, we have developed a novel technique named transverse spatial phase-shifting method. Only using four photoelectric detectors with a certain spatial array, the method can directly detect wavefront phase variation due to external vibrations. As soon as wavefront variation was determined, some feedback control could be put on interferometer to compensate the vibrations. This method was applied to a Twyman-Green phase-shifting interferometer in which an adaptive vibration-compensated system has been built, it calibrated wavefront phase in real time by a piezoelectric transducer used as both wavefront phase shifter and vibration feedback device, thus fringe pattern could be stabilized and the optical testing would be carried out. Some experimental results were presented.
Document Type: Research Article
Affiliations: 1: Zhenjiang Watercraft Institute, Zhenjiang 212003, China 2: School of Electronic Engineering and Photoelectric Technology, Nanjing University of Science & Technology, Nanjing 210094, China
Publication date: October 1, 2004