If you are experiencing problems downloading PDF or HTML fulltext, our helpdesk recommend clearing your browser cache and trying again. If you need help in clearing your cache, please click here . Still need help? Email help@ingentaconnect.com

Simulation of laser-focused atomic deposition for nanostructure fabrication

$30.41 plus tax (Refund Policy)

Buy Article:


We analyze the two-level atom focusing in a Gaussian standing wave laser field from the perspective of both classical mechanics and wave mechanics. The effects of source imperfection such as velocity spread and beam spread on the feature width are analyzed by numerically integrating the classical equation of atomic motion. The atomic flux distributions during its propagation in a laser field are calculated based on the Monte Carlo scheme and the trajectory tracing method, and results have shown that the focus depth of atom lens for real atomic source is longer than that for perfect source. In the absence of source imperfection, the contribution of diffractive aberration originating from the wave nature of the atom to broadening of feature width is larger than that of spherical aberration. Feature separation can be reduced by changing the detuning of the standing wave laser field from blue to red halfway through the deposition time.

Document Type: Research Article

DOI: http://dx.doi.org/10.1078/0030-4026-00350

Affiliations: State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China

Publication date: September 1, 2004

Related content



Share Content

Access Key

Free Content
Free content
New Content
New content
Open Access Content
Open access content
Subscribed Content
Subscribed content
Free Trial Content
Free trial content
Cookie Policy
Cookie Policy
ingentaconnect website makes use of cookies so as to keep track of data that you have filled in. I am Happy with this Find out more