Phase retrieval microscopy for quantitative phase-contrast imaging
Abstract:We present an approach for quantitative phase contrast imaging and optical metrology. This technique uses a CCD for in-line hologram recording and the phase retrieval algorithm for hologram reconstruction. The obtained phase distribution is equal, module 2π, to the phase distribution of the surface of the object. An application to surface profilometry is presented and good measurement result has been achieved.
Document Type: Research Article
Affiliations: 1: Department of Physics, Capital Normal University, Xisanhuan Beilu 105 Beijing 100073, China 2: Institut für Technische Optik, Universität Stuttgart, Pfaffenwaldring 9, 70569 Stuttgart, Germany
Publication date: 2004-05-01