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A low voltage time of flight electron emission microscope

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Abstract:



This paper presents the design of a low voltage time of flight electron emission microscope (TOF-EEM), which should in principle be capable of acquiring spectral chemical information at nano-metre spatial resolution. The system will be able to operate as a photoelectron emission microscope (PEEM), an X-ray photoemission electron microscope (XPEEM), or a secondary electron emission microscope (SEEM). For each pixel in its highly magnified topographic image, the TOF-EEM column should be able to provide the emission spectrum with milli-electron-volt resolution. The system is designed to operate at secondary electron beam voltages of typically less than 100 V, and has the possibility of dynamically correcting for chromatic aberration. Provisional simulation results predict that the TOF-EEM column should be able to provide an image resolution of better than 2 nm.

Keywords: Electron emission microscopy; time of flight spectroscopy

Document Type: Original Article

DOI: http://dx.doi.org/10.1078/0030-4026-00202

Affiliations: Department of Electrical and Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore 117576

Publication date: January 1, 2003

urban/361/2003/00000113/00000011/art00202
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