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Relationship between the fifth order aberration coefficients in electron optical deflective focusing system

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Abstract:

Relationships between aberration coefficients up to the fifth order have been derived using symplectic conditions for a rotationally invariant electron optical deflective focusing system. These relationships show that the third and fifth order coefficients correlate and a part of the fifth order aberration coefficients can be calculated by the third order coefficients. Using these relationships, we side checked a computer code for the fifth order aberration analysis with a differential algebra method.

Keywords: Electron optical deflection; aberration; scanning electron microscopy

Document Type: Original Article

DOI: http://dx.doi.org/10.1078/003040202400391390

Affiliations: NTT Telecommunications Energy Labs., Morinosato Wakamiya 3-1, Atsugi, Kanagawa, 243-0198, Japan

Publication date: June 1, 2002

urban/361/2002/00000113/00000003/art00117
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