Relationship between the fifth order aberration coefficients in electron optical deflective focusing system
Abstract:Relationships between aberration coefficients up to the fifth order have been derived using symplectic conditions for a rotationally invariant electron optical deflective focusing system. These relationships show that the third and fifth order coefficients correlate and a part of the fifth order aberration coefficients can be calculated by the third order coefficients. Using these relationships, we side checked a computer code for the fifth order aberration analysis with a differential algebra method.
Document Type: Original Article
Affiliations: NTT Telecommunications Energy Labs., Morinosato Wakamiya 3-1, Atsugi, Kanagawa, 243-0198, Japan
Publication date: June 1, 2002