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Numerical simulation of high-NA quantitative polarization microscopy and corresponding near-fields

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Abstract:

To understand polarization effects in image formation for critical structures, a model based on the pupil approach and the Fourier modal method is presented for numerical simulation of high numerical aperture polarization-microscopy images and the near-fields producing them. A good agreement with measurements is obtained and discussed.

Keywords: CD measurements; Microscopy; polarization; rigorous simulation

Document Type: Original Article

DOI: http://dx.doi.org/10.1078/0030-4026-00085

Affiliations: Institut für Technische Optik, Universität Stuttgart, Pfaffenwaldring 9, 70569 Stuttgart, Germany

Publication date: November 1, 2001

urban/361/2001/00000112/00000009/art00085
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