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Ellipso-Height Topometry, EHT: extended topometry of surfaces with locally changing materials

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Abstract:

The principle of the new Ellipso-Height Topometry and the basic relations for measurement and calibration are shown in detail. First topography sets are presented and discussed: topography of the height, of the ellipsometric angles Ψ and Δ, of the real and imaginary part of the complex refractive index, of the corrected heights, of the local thickness, and material maps. Results for two different samples are presented: a photolithographic object with microstructures of silicon and SiO2 and a rough surface of a cylinder bore of a automobile engine, demonstrating the use for industrial application.

Keywords: Topometry; ellipsometry; extended topometry; material recognition

Document Type: Original Article

DOI: http://dx.doi.org/10.1078/0030-4026-00079

Affiliations: Institut für Technische Optik, Universität Stuttgart, Pfaffenwaldring 9, D-70569 Stuttgart, Germany

Publication date: November 1, 2001

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