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High resolution optical sensor for the inspection of engine cylinder walls

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The inspection of an engine cylinder wall is an important industrial application for optical sensors. This task is an example, where a 3-D characterization of the microstructure is needed to obtain a full functional surface description. Recently several approaches have been made to solve this problem. In this paper a short comparison about the different approaches is given and a new highly resolving sensor is presented. This sensor enables a spatial resolution of 1 μm, a vertical resolution of up to 1 nm, and is realized in a very compact housing. Measurements are given which demonstrate the progress in this application field.

Keywords: White-light interferometry; engine inspection; industrical inspection

Document Type: Original Article

DOI: http://dx.doi.org/10.1078/0030-4026-00078

Affiliations: Institut für Technische Optik, University of Stuttgart, Pfaffenwaldring 9, D-70569 Stuttgart

Publication date: November 1, 2001

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