High resolution optical sensor for the inspection of engine cylinder walls
Abstract:The inspection of an engine cylinder wall is an important industrial application for optical sensors. This task is an example, where a 3-D characterization of the microstructure is needed to obtain a full functional surface description. Recently several approaches have been made to solve this problem. In this paper a short comparison about the different approaches is given and a new highly resolving sensor is presented. This sensor enables a spatial resolution of 1 μm, a vertical resolution of up to 1 nm, and is realized in a very compact housing. Measurements are given which demonstrate the progress in this application field.
Document Type: Original Article
Affiliations: Institut für Technische Optik, University of Stuttgart, Pfaffenwaldring 9, D-70569 Stuttgart
Publication date: November 1, 2001