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Spectroscopic ellipsometry characterization of Er3+-dopedtitania thin films prepared by the sol-gel method

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Abstract: Titania thin films prepared by the sol-gel method were optically characterized by spectroscopic ellipsometry. These films were doped with Er3+ and supported on silicon wafers chemically activated by using the dipping method. The dielectric function was modeled using the Forouhi-Bloomer model, which provides also the refractive index and the thickness of the film.

Keywords: Sol-gel method; ellipsometry; film characterization; thin films

Document Type: Original Article


Affiliations: 1: Factultad Ciencias Físico-Matemáticas, BUAP, Apdo. Postal 1152, Puebla, México 2: CINVESTAV-IPN, Unidad Querétaro, Apdo. Postal 1-798, 76010, Querétaro, México 3: Instituto de Física, BUAP, Apdo. Postal J-48, 72570, Puebla, México 4: Instituto de Física, UNAM, Apdo. Postal 1-1010, Querétaro, México

Publication date: June 1, 2001


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