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Curvilinear-axis focusing and aberration theory of wide electron beams for combined immersion magnetic-electrostatic lens systems

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Abstract: Curvilinear-axis Gaussian electron optical properties and aberration characteristics of wide electron beams for combined immersion magnetic-electrostatic lenses are studied. Based on general wide beam and curvilinear-axis theory, paraxial trajectory equations in local orthogonal coordinates are obtained, and all of the second-order curvilinear-axis aberration coefficients are derived using a symbolic manipulation software Mathematica. The present paper lays a theoretical groundwork for further studies on curvilinear-axis focusing and aberration theory for the combined immersion magnetic-electrostatic lenses.
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Keywords: Curvilinear-axis electron optics; combined immersion magnetic-electrostatic lenses; curvilinear-axis aberrations

Document Type: Original Article

Affiliations: Department of Electronics Science and Technology, School of Electronics and Information Engineering, Xi'an Jiaotong University, Xi'an, 710049, P. R. China

Publication date: 2001-06-01

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