Skip to main content

Open Access In-Situ Measurements of Charged Nanoparticles Generated During Hot Wire Chemical Vapor Deposition of Silicon Using Particle Beam Mass Spectrometer

Download Article:
 Download
(PDF)
 
It has been experimentally confirmed in many chemical vapor deposition (CVD) processes that charged nanoparticles tend to be generated in the gas phase. In an effort to confirm and measure charged gas phase nuclei, that might be generated during the deposition of Si thin films by hot wire CVD, we performed an In-Situ measurement using particle beam mass spectrometer (PBMS), which can measure a size distribution of nanoparticles at low pressure. The size distribution of positively and negatively charged Si gas phase nuclei generated during hot wire CVD under 1.5 torr could be firstly measured. The particle diameter at the peak of the size distribution is about 10 ∼ 13 nm. At a wire temperature of 1800°C, the number concentration of negatively charged Si nanoparticles was higher than that of positively charged ones. The size and number concentration of charged nanoparticles decreased with increasing wire temperature from 1800 to 2000°C and increased with increasing SiH4 concentration from 3 to 6%.

Copyright 2013 American Association for Aerosol Research
No References for this article.
No Supplementary Data.
No Data/Media
No Metrics

Document Type: Research Article

Affiliations: 1: Department of Materials Science & Engineering,Seoul National University, Kwanak-gu, Seoul, Republic of Korea 2: Department of Mechanical Engineering, Sungkyun Advanced Institute of Nano Science and Technology (SAINT),Sungkyunkwan University, Suwon, Republic of Korea

Publication date: 2013-01-01

More about this publication?
  • Access Key
  • Free content
  • Partial Free content
  • New content
  • Open access content
  • Partial Open access content
  • Subscribed content
  • Partial Subscribed content
  • Free trial content
Cookie Policy
X
Cookie Policy
Ingenta Connect website makes use of cookies so as to keep track of data that you have filled in. I am Happy with this Find out more