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Publisher: Taylor and Francis Ltd

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Volume 22, Number 1, January 2011

Novel models and approaches for semiconductor manufacturing
pp. 1-3(3)
Authors: Dauzere-Peres, Stephane; Yugma, Claude; Sarin, Subhash

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A survey of dispatching rules for operational control in wafer fabrication
pp. 4-24(21)
Authors: Sarin, Subhash; Varadarajan, Amrusha; Wang, Lixin

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Lumped parameter modelling of the litho cell
pp. 41-49(9)
Authors: Kock, A. A. A.; Veeger, C. P. L.; Etman, L. F. P.; Lemmen, B.; Rooda, J. E.

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Metamodelling for cycle time-throughput-product mix surfaces using progressive model fitting
pp. 50-68(19)
Authors: Yang, Feng; Liu, Jingang; Nelson, Barry; Ankenman, Bruce; Tongarlak, Mustafa

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Flexibility measures for qualification management in wafer fabs
pp. 81-90(10)
Authors: Johnzen, Carl; Dauzere-Peres, Stephane; Vialletelle, Philippe

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Process clusters for information system diagnostics: an approach by Organisational Urbanism
pp. 91-106(16)
Authors: Boucher, Xavier; Chapron, Julie; Burlat, Patrick; Lebrun, Pierre

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