A non-contact technique for determining the depth of zero-order gratings

Authors: Hallam B. T.; Sambles J. R.

Source: Journal of Modern Optics, Volume 47, Number 8, 10 July 2000 , pp. 1475-1481(7)

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Abstract:

In this work we present a simple, non-contact method for characterizing the depth of deep zero-order diffraction gratings using standard visible optics. Form birefringence exhibited by zero-order structures alters the polarization state of light transmitted through them. The amount of change is dependent on several factors including the depth of the grating grooves. By recording the polarization changes of laser light transmitted through the sample we demonstrate how the depth of any grating with a known pitch may be determined. Results for many different gratings have been analysed and show good agreement with groove depths measured from scanning electron micrographs. From these results a universal relationship between the amount of polarization change and the depth of the grating grooves has been determined.

Language: English

Document Type: Research article

Publication date: 2000-07-10

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