STRATEGY FOR LOW-TEMPERATURE CRYSTALLIZATION OF TITANIUM-RICH PZT THIN FILMS BY CHEMICAL SOLUTION DEPOSITION
Pb(Zr0.30Ti0.70)O3 thin films were prepared by chemical solution deposition from PbO or Pb(OAc)2 and transition metal butoxides in 2-methoxyethanol. The orientation of the perovskite phase critically depends on the reagents used for the synthesis of the sols which consequently determine the processes taking place within the bulk of the film upon heating. Depending on the reagent, PbO or Pb(OAc)2, and heating profile used, single- or multi-step heating, the films with (111) or (100) oriented perovskite phase, and with columnar or equiaxed microstructures are synthesized at as low as 400°C.
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Document Type: Research Article
Affiliations: Jozef Stefan Institute, Ljubljana, Slovenia
Publication date: 2008-01-01