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LARGE AREA PIEZOELECTRIC ACTUATORS USING METAL FOIL SUBSTRATES WITH Pb(Zrx,Ti1 - x)O3 THIN FILMS

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We report on the deposition of Pb(Zrx,Ti1 - x)O3 (PZT) thin films by chemical solution deposition (CSD) on stainless steel foils. The electrical characterization proves good ferroelectric properties with a remnant polarization of 38  C/cm2. Since PZT is also piezoelectric the 35  m and 50  m thick metal foils are used to make piezoelectric actuated cantilever beams of several millimeter lengths. Actuated with 10-30 V a displacement up to 32  m was measured in quasi-static mode. In resonance mode the displacement increases several times at the same driving voltage.
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Document Type: Research Article

Affiliations: 1: Forschungszentrum Julich, Institut fur Festkorperforschung, Julich, Germany 2: Institut fur Werkstoffe der Elektrotechnik 2, Aachen, Germany 3: Forschungszentrum Julich, Institut fur Festkorperforschung, Julich, Germany,Institut fur Werkstoffe der Elektrotechnik 2, Aachen, Germany

Publication date: 2008-01-01

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