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The dielectric properties of barium strontium titanate thin films with composition Ba0.6Sr0.4TiO3 were studied as a function of film thickness for implementation in a variety of devices with different requirements. Films were prepared by metalorganic solution deposition and characterized using scanning electron microscopy, atomic force microscopy, and Rutherford back-scattering. The dielectric (100 kHz) and insulating properties were also measured. The film morphology and dielectric/insulating properties are thickness dependent, yet the best combination of properties was in films of 160 nm to 240 nm. These films had a moderate dielectric constant (∼300), low loss (∼ 0.029), good tunability (∼ 30%), and low leakage current (∼ 10- 8 A/cm2).
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Keywords: BST; dielectric constant; leakage current; loss; thickness; tunability

Document Type: Research Article

Affiliations: 1: Materials Science and Engineering Program and Institute of Materials Science, University of Connecticut, Storrs, CT, U.S.A. 2: Weapons and Materials Research Directorate, Materials Directorate, Active Materials Research Team, U.S. Army Research laboratory, Aberdeen Proving Ground, MD, U.S.A.

Publication date: 2008-01-01

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