CHARACTERISATION OF FERROELECTRIC PbZrXTi 1-X O 3 (PZT) THIN FILMS PREPARED BY LIQUID-DELIVERY METALORGANIC CHEMICAL VAPOR DEPOSITION

A growth of leaf shape crystals was observed by SEM in the case of excess of Pb in the MOCVD grown films. Contrary, when the lead content was 20 at% or lower, the PZT-films were transparent and smooth. X-ray diffraction (XRD) measurements showed a presence of lead oxide phase additionally to the perovskite phase in the as-deposited PZT films. A pyrochlore phase began to form at an annealing temperature at 600°C. PZT films annealed at 520°C exhibit square hysteresis loop with peak Pr values of 60 μ C/cm 2 and coercive voltage of 2 V.