ACTIVE DAMPING OF A PIEZOELECTRIC MEMS ACOUSTIC SENSOR

This paper presents the fabrication process and active damping strategy of piezoelectric MEMS acoustic sensor by combining two functions of sensing and actuation of the PZT film in one device. The electric characteristics of PZT film were determined by measurement. Simulation of self-sensing control law, and control circuit are introduced. Important issues of the implementation of closed loop damping control are discussed. Experiment results show that the self-sensing damping of piezoelectric MEMS acoustic sensor is implemented successfully. This technology is more promising in improving the dynamic performance of piezoelectric MEMS devices because very low driven voltage and power consuming are sufficient.